
MPCVD
Drawing Die Nano-Diamond Coating HFCVD Equipment
드로잉 다이 나노-다이아몬드 코팅 HFCVD 장비
Item Number : MP-CVD-100
Price varies based on specs and customizations
MPCVD
Drawing Die Nano-Diamond Coating HFCVD Equipment
드로잉 다이 나노-다이아몬드 코팅 HFCVD 장비
Item Number : MP-CVD-100
Price varies based on specs and customizations
Application
다이아몬드 작동 원리는 탄소 함유 대기와 과포화 수소를 혼합하고 특정 방식으로 활성화한 다음 특정 대기 조성, 활성화 에너지, 기판 온도, 기판과 활성화 소스 사이의 거리 등을 통과시키는 것입니다. 이러한 조건에서 다이아몬드 필름이 바닥 표면에 증착됩니다. 일반적으로 다이아몬드 필름의 핵 형성 및 성장은 세 단계로 나눌 수 있다고 알려져 있습니다:
Detail & Parts
Technical specifications
HFCVD technical composition | ||
Technical Parameters | Equipment composition | System Configuration |
Bell Jar: Dia. 500mm, Height 550mm, SUS304 stainless steel chamber; inner stainless steel skin insulation, lifting height is 350mm; | A set of vacuum chamber (bell jar) main body (jacketed water-cooling structure) | Vacuum chamber (bell jar) main body;The cavity is made of high-quality 304 stainless steel; Vertical bell jar: the jacketed water-cooling jacket is installed on the overall periphery of the bell jar. The inner wall of the bell jar is insulated with stainless steel skin, and the bell jar is fixed on the side . Accurate and stable positioning ; Observation window: horizontally arranged in the middle of the vacuum chamber 200mm Observation window, water cooling, baffle, side and upper configuration 45 Degree bevel angle, 50° observation window (observe the same point as the horizontal observation window, and the sample supporting platform); the two observation windows maintain the existing position and size.Bell jar bottom is 20mm higher than the plane of the bench , set cooling; the holes reserved on the plane, such as large valves, air release valves, air pressure measurement, bypass valves, etc., are sealed with metal mesh and reserved for installing electrodes Interface; |
Equipment table: L1550* W900*H1100mm | One set of drag sample table device (adopting double-axis drive ) | Sample holder device: Stainless steel sample holder (welding water cooling ) 6- position device; it can be adjusted separately, only up and down adjustment, the up and down adjustment range is 25mm, and the left and right shaking is required to be less than 3% when going up and down ( that is, the left and right shaking of rising or falling by 1mm is less than 0.03mm ) , and the sample stage does not rotate when rising or falling. |
Ultimate vacuum degree: 2.0×10-1Pa ; | A set of vacuum system | Vacuum system: Vacuum system configuration: mechanical pump + vacuum valve + physical bleed valve + main exhaust pipe + bypass; (provided by the vacuum pump supplier), the vacuum valve uses a pneumatic valve; Vacuum system measurement: Membrane pressure. |
Pressure rise rate : ≤5Pa/h; | Two channels mass flow meter gas supply system | Gas supply system: The mass flow meter is configured by Party B, two-way air intake, the flow rate is controlled by the mass flow meter, after the two-way meeting, it enters the vacuum chamber from the top , and the inside of the air intake pipe is 50mm |
Sample table movement: up and down range is ± 25m; it is required to shake left and right ratio when up and down by ± 3%; | One set of electrode device (2 channels) | Electrode device: The length direction of the four electrode holes is parallel to the length direction of the support platform, and the length direction is facing the main observation window with a diameter of 200mm . |
Working pressure: use membrane gauge pressure gauge, measuring range: 0 ~ 10kPa; work constant at 1kPa ~5kPa,the constant pressure value changes plus or minus 0.1kPa; | A set of cooling water system | Cooling water system: The bell jar, electrodes, and bottom plate are all equipped with circulating water cooling pipelines, and are equipped with insufficient water flow alarm device 3.7: control system. Switches, instruments, instruments and power supply for bell lifting, deflation, vacuum pump, main road, bypass, alarm, flow, air pressure, etc. are set on the side of the stand, and are controlled by a 14 -inch touch screen; the equipment has a fully automatic control program without manual intervention, and can store data and call data |
Air intake position: air intake at the top of the bell jar, and the position of the exhaust port is located directly below the sample holder; | Control system | |
Control System: PLC controller + 10-inch touch screen | A set of automatic pressure control system (original pressure control valve imported from Germany ) | |
Inflation system: 2 channels mass flow meter, flow range: 0-2000sccm and 0-200sccm; Pneumatic valve valve | Resistance Vacuum Gauge | |
3.1.10 Vacuum pump: D16C vacuum pump |
Advantages
나노 다이아몬드 복합 코팅 드로잉 다이는 초경합금 (WC-Co)을 기판으로 사용하고 화학 기상 법 (줄여서 CVD 법)을 사용하여 금형 내부 구멍 표면에 기존 다이아몬드와 나노 다이아몬드 복합 코팅을 코팅합니다. 그리고 코팅을 연마하고 연마 한 후 얻은 새로운 제품입니다. 내부 구멍 표면에 코팅 된 나노 다이아몬드 복합 코팅은 기존 다이아몬드
코팅의 강한 접착력과 내마모성의 특성을 가질뿐만 아니라 나노 다이아몬드 코팅의 평평하고 매끄러운 표면, 작은 마찰 계수 및 쉬운 연삭 및 연마의 장점도 가지고 있습니다. 코팅 기술은 코팅 접착력의 기술적 문제를 해결할뿐만 아니라 다이아몬드 코팅 표면이 연마하기 쉽지 않은 병목 현상을 돌파하고 CVD 다이아몬드 필름의 산업화 장애물을
제거합니다.
Comparation table between traditional and nano diamond coated drawing die
Technical indicators | Traditional drawing die | Nano-diamond coated drawing die |
Coating Surface Grain Size | none | 20~80nm |
Coating diamond content | none | ≥99% |
Diamond Coating Thickness | none | 10 ~ 15mm |
Surface roughness | Ra≤0.1mm | Class A: Ra≤0.1mm Class B: Ra≤0.05mm |
Coating drawing die inner hole diameter range | Ф3 ~ Ф70mm | Ф3 ~ Ф70mm |
Service life span | Life span depends on working conditions | 6-10 times longer |
Surface friction coefficient | 0.8 | 0.1 |