Ultra-high Resolution FESEM   ㅣ   SEM5000X


Ultra-high resolution Field Emission Scanning Electron Microscopy (FESEM): 0.6 nm@15 kV and 1.0 nm@1 kV


The CIQTEK SEM5000X ultra-high resolution FESEM utilizes the upgraded column engineering process, “SuperTunnel” technology, and high-resolution objective lens design to improve low-voltage imaging resolution.


The FESEM SEM5000X specimen chamber ports extend to 16, and the specimen exchange load-lock supports up to 8-inch wafer size (maximum diameter 208 mm), significantly expanding the applications. The advanced scanning modes and enhanced automated functions bring stronger performance and an even more optimized experience.


 FESEM SEM5000X Image Gallery

Technical Highlights


  • Ultra-high resolution FESEM imaging with breakthrough 0.6nm@15kV, 1.0nm@1kV
  • Dual deceleration technology combining specimen stage tandem deceleration and "SuperTunnel" electron optics technology, ready to challenge extreme imaging conditions.
  • High-precision mechanical eucentric specimen stage, ultra-stable vibration-damping design, also available with integral enclosure option, greatly minimize the environmental interference that can affect resolution
  • Specimen exchange loadlock for up to 8" wafer (maximum 208 mm in diameter), for semiconductor and scientific research
FESEM SEM5000X Specifications
Key Parameters
Resolution
0.6 nm @ 15 kV, SE
1.0 nm @ 1 kV, SE
Acceleration Voltage
0.02~30 kV
Magnification
1~2,500,000 x
Electron Gun Type
Schottky Field Emission Electron Gun
Specimen Chamber
Vacuum System
Fully Automated Control
Cameras
Dual Cameras (optical navigation + chamber monitor)
Stage Type
5-Axis Mechanical Eucentric Specimen Stage
Stage Range

X=110 mm, Y=110 mm, Z=65 mm

T: -10*~+70°, R: 360°

SEM Detectors and Extensions
Standard

In-lens Detector

Everhart-Thornley Detector (ETD)

Optional

Retractable Back-Scattered Electron Detector (BSED)

Retractable Scanning Transmission Electron Microscopy Detector (STEM)

Energy Dispersive Spectrometer (EDS/EDX)

Electron Backscatter Diffraction Pattern (EBSD)

Specimen Exchange Loadlock (4" & 8" optional)

Trackball & Knob Control Panel

Specimen Stage Tandem Deceleration

Magnetic Field & Acoustic Noise Enclosure System (SEMI Certified)

Software
Languages
English
Operating System
Windows
Navigation
Nav-Cam, Gesture Quick Navigation
Automatic Functions
Auto Brightness & Contrast, Auto Focus, Auto Stigmator