
Ultra-high Resolution FESEM ㅣ SEM5000X
Ultra-high resolution Field Emission Scanning Electron Microscopy (FESEM): 0.6 nm@15 kV and 1.0 nm@1 kV
The CIQTEK SEM5000X ultra-high resolution FESEM utilizes the upgraded column engineering process, “SuperTunnel” technology, and high-resolution objective lens design to improve low-voltage imaging resolution.
The FESEM SEM5000X specimen chamber ports extend to 16, and the specimen exchange load-lock supports up to 8-inch wafer size (maximum diameter 208 mm), significantly expanding the applications. The advanced scanning modes and enhanced automated functions bring stronger performance and an even more optimized experience.