FIB-SEM   ㅣ   DB500


Field Emission Scanning Electron Microscope (FE-SEM) with Focused Ion Beam (FIB) Columns


The CIQTEK DB500 Focused Ion Beam Scanning Electron Microscope (FIB-SEM) adopts “SuperTunnel” electron optics technology, low aberration, and non-magnetic objective design with low voltage and high-resolution capability to ensure the nano-scale analysis. The ion column facilitates a Ga+ liquid metal ion source with a highly stable and high-quality ion beam for nanofabrication.

 

FIB-SEM DB500 has an integrated nano-manipulator, gas injection system, electrical anti-contamination mechanism for the objective lens, and 24 expansion ports, making it an all-around nano-analysis and fabrication platform with comprehensive configurations and expandability.


FIB-SEM Image Gallery

Technical Highlights


Focused Ion Beam (FIB) Column

  • Resolution: 3 nm@30 kV
  • Probe current (Ion beam current range): 1 pA~50 nA
  • Acceleration voltage range: 0.5~30 kV
  • Ion source exchange interval: ≥1000 hours
  • Stability: 72 hours of uninterrupted operation


Gas Injection System

  • Single GIS design
  • Various gas precursor sources are available
  • Needle insertion distance ≥35 mm
  • Motion repeatability ≤10 μm
  • Heating temperature control repeatability ≤0.1°C
  • Heating range: Room temperature ~ 90°C (194°F)
  • Integrated control



Nano-manipulator

  • Chamber internally mounted
  • Three-axis all-piezoelectrically driven
  • Stepper motor accuracy ≤10 nm
  • Maximum travel speed 2 mm/s
  • Integrated control





CIQTEK FIB-SEM Focused Ion Beam Scanning Electron Microscope BD500

CIQTEK FIB-SEM Practical Demonstration - TEM Sample Preparation

CIQTEK FIB-SEM DB500 Specifications
Electron Beam System
Electron Gun Type
High Brightness Schottky Field Emission Electron Gun
Resolution
1.2 nm@15 kV
Acceleration Voltage
0.02~30 kV
Ion Beam System
Ion Source Type
Liquid Gallium Ion Source
Resolution
3 nm@30 kV
Acceleration Voltage
0.5~30 kV
Specimen Chamber
Vacuum System
Fully Automatic Control, Oil-free Vacuum System
Cameras

Three Cameras

(Optical navigation + chamber monitor x2)

Stage Type
5-axis Mechanical Eucentric Specimen Stage
Stage Range

X=110 mm, Y=110 mm, Z=65 mm

T: -10°~+70°, R:360°

SEM Detectors and Extensions
Standard

In-lens Detector

Everhart-Thornley Detector (ETD)


Optional

Retractable Back-Scattered Electron Detector (BSED)

Retractable Scanning Transmission Electron Microscopy Detector (STEM)

Energy Dispersive Spectrometer (EDS/EDX)

Electron Backscatter Diffraction Pattern (EBSD)

Nano-manipulator

Gas Injection System

Plasma Cleaner

Specimen Exchange Loadlock

Trackball & Knob Control Panel

Software
Languages
English
Operating System
Windows
Navigation
Nav-Cam, Gesture Quick Navigation
Automatic Functions
Auto Brightness & Contrast, Auto Focus, Auto Stigmator